ALIGNMENT OF THE WRITING BEAM WITH THE DIFFRACTION STRUCTURE ROTATION AXIS IN SYNTHESIS OF DIFFRACTIVE OPTICAL ELEMENTS IN A POLAR COORDINATE SYSTEM
R. V. Shimanskii, A. G. Poleshchuk, V. P. Korolkov, V. V. Cherkashin
Institute of Automation and Electrometry, Siberian branch, Russian Academy of Sciences, 630090, Novosibirsk, prosp. Akademika Koptyuga, 1
Keywords: дифракционные оптические элементы, лазерная запись, нанопозиционирование, определение оси вращения заготовки, diffractive optical elements, laser writing, nanopositioning, determination of the optical blank rotation axis
Abstract
A method is developed to ensure precise alignment of the origin of a polar coordinate system in which the laser beam position is defined in writing diffractive optical elements with the optical blank rotation axis. This method is used to improve the accuracy of a circular laser writing system in writing large-scale diffractive optical elements in a polar coordinate system. Results of studying new algorithms of detection and correction of positioning errors of the circular laser writing system in the course of writing are reported.
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