HIGH-PASS SUBTERAHERTZ FILTERS IMPLEMENTED WITH THE USE OF HIGH-ASPECT POLYMER STRUCTURES
S. A. Kuznetsov1,2,3, A. N. Gentselev1, S. G. Baev4
1Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, prosp. Akademika Lavrent'eva, 11
2Novosibirsk State University, 630090, Novosibirsk, ul. Pirogova, 2
3"Design-and-Technology Institute of Applied Microelectronics", 630090, Novosibirsk, prosp. Akademika Lavrent'eva, 2/1
4Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, prosp. Academika Koptyuga, 1
Keywords: рентгеновская литография, высокоаспектные микроструктуры, фильтры высоких частот, X-ray lithography, high-aspect microstructures, high-frequency filters
Abstract
This paper describes the technological approach to the implementation of quasioptical high-pass subterahertz filters with the use of high-aspect pseudometallic structures. The approach is based on microstructuring of the solid polymer layer of polymethylmethacrylate by synchrotron X-ray lithography with subsequent metallization of the entire surface of the structure. This paper also presents the example of the manufactured sample and the operational characteristics of the high-pass filter with a cut-off frequency of 0.275 THz, whose thickness is 1 mm and which was formed by hexagonally packed open-end hexangular holes separated by partitions 70 μm. The electrodynamic analysis and design basics of high-pass structures are given too.
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