Convective Diffusion from Gas to a Rotating Disk
E. L. Pankratov, P. B. Boldyrevskii
Lobachevsky Nizhny Novgorod State University, Nizhny Novgorod 603950, Russia
Keywords: эпитаксия из газовой фазы, конвективная диффузия, диск-подложкодержатель, epitaxy from gas phase, convective diffusion, substrate holder disk
Abstract
This paper presents a new method of analytical calculation of the flow rate of the gas mixture and the concentration of the growth component during gas-phase epitaxy in a reaction chamber with a rotating substrate holder disk. The concentration of the growth component is analyzed in relation to a number of epitaxy process parameters.
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