DIRECT LASER WRITING OF GRAY-SCALE MICROIMAGES WITH A LARGE DYNAMIC RANGE IN CHROMIUM FILMS
A. G. Poleshchuk, V. P. Korolkov, A. G. Sedukhin, A. R. Sametov, R. V. Shimanskii
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk, 630090 Russia
Keywords: лазерная запись, лазерное окисление, термохимические реакции, аподизация, датчик Шэка - Гартмана, laser writing, laser oxidation, thermochemical reactions, apodization, Shack , Hartmann sensor
Abstract
A method for direct laser thermochemical writing of gray-scale microimages in thin chromium films is developed and studied. The method includes exposing a chromium film with a focused laser beam with variable power intensity and developing it in a selective etchant. The range of variation of the transmission by more than 100 times is obtained. The nonlinearity of the dependence of the chromium film transmission on the power intensity of the exposing beam is eliminated by software correction. The samples of the raster (with a size of 64×64 and a step of 176 μm) of apertures (36 μm) with the gray-scale Gaussian transmission function are manufactured experimentally. This raster is used in the modified Shack - Hartmann sensor.
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