MICROFLUIDIC ELECTRIC GENERATOR BASED ON A SILICON MICROCHANNEL MEMBRANE
M. A. Parashchenko, N. S. Filippov, V. V. Kirienko
Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrent’eva 13, Novosibirsk, 630090 Russia
Keywords: macroporous silicon, microchannel membrane, streaming potential, microfluidic system, microfluidic electric generator
Abstract
This paper is devoted to the development and characterization of a microfluidic electric generator based on a silicon microchannel membrane. The voltage and current produced by the generator and the power dissipated on the load resistance during fluid passage through the membrane for different values of the load resistance were determined in experiments using deionized water. The performance of the device is estimated. The possibility of using silicon membranes as the working element of the microfluidic generator is demonstrated. It is suggested that, based on this device, generators suitable for low-power supply can be manufactured. The device can be used as a sensor element for determining fluid flow rate.
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