Synthesis and Properties of Transparent Conducting Films of Tin Dioxide Doped with Fluorine
S. A. Serenko1, N. F. Uvarov2, V. A. Gavrilenko1
1Novosibirsk State Technical University, Ul. K. Marksa 20, Novosibirsk 630073, Russia
2Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch of the Russian Academy of Sciences, Ul. Kutateladze 18, Novosibirsk 630128, Russia
Keywords: thermal decomposition of aerosol, tin oxide, nanoparticles, transparent conducting coatings, FTO
Abstract
Transparent conducting thin film coatings based on tin oxide doped with fluorine SnO2-хFх were obtained by pyrolysis of aerosol. The coatings are characterized by nanocrystals structure with average particle size 14 nm. The kinetic dependences of the changes of film resistance were studied in situ during an increase in coating thickness. The major stages of the film growth process were determined. The regimes of obtaining transparent SnO2-хFх films with specific conductance more than 103 S/cm were elaborated.
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