Electrochemical Stability of Indium-Tin Oxides
A. G. BELOBABA,В В A. G. ZELINSKIY,В В A. A. GUSEV,В В and A. I. MASLIY
Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch, Russian Academy of Sciences, Ul. Kutateladze 18, Novosibirsk 630128 (Russia)
E-mail: belobaba@ngs.ru
Keywords: indium-tin oxides, ITO, cathode reduction, anodic dissolution, magnetron targets
Pages: 401–406
Abstract
The electrochemical activity of mixed indium-tin oxides (ITO) at the cathode and anode treatment in various solvents was studied. It was established that in case of the anodic polarization at potentials that are more negative than the potential prior to the beginning of hydrogen evolution in appropriate solutions of ITO were reduced to the metals In and Sn followed by the formation of intermetallides. It was shown at the anodic treatment the nature of the acid and current density had a big impact on the rate of the anodic dissolution of ITO. The dissolution rate in HCl is lower than in H2SO4 and significantly reduced with the increase of the acid concentration due to the acceleration of the side reaction of the evolution of Cl2. The electrochemical activity of ITO at the cathode and anodic treatment in solutions allows using electrolysis for the disposal of used magnetron targets or ITO scraps.
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