NEW MICROELECTROMECHANICAL CAVITIES FOR GIGAHERTZ FREQUENCIES
E. G. Kostsov1, S. I. Fadeev2
1Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk, 630090 Russia
kostsov@iae.nsk.su
2Sobolev Institute of Mathematics, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 4, Novosibirsk, 630090 Russia
Keywords: microwave MEMS, microcavity, frequency generator, HF filter, natural oscillations
Abstract
A possibility of creating micrometer-sized microelectromechanical cavities operating at gigahertz frequencies is considered. A thin film of a dielectric (ferroelectric) with a high dielectric permeability and electric strength is included into the cavity structure. Specific features of device operation and its structure are described by a mathematical model that allows one to find exact relations between the parameters characterizing natural oscillations of the moving element and the triggering voltage.
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