Low-Voltage Element of a Field-Programmable Dynamic Diffraction Grating
E. G. Kostsov, V. S. Sobolev
Keywords: microelectronics, microelectromechanics, microoptoelectromechanics, microoptics, diffraction grating, electrostatics
Pages: 101-109
Abstract
A new element of a field-controlled diffraction grating [Grating Light ValveTM diffractive MOEMS device (GLV)] is described, which differs from known similar elements by the physical principle of operation and its structure; other distinctive features are the lower control voltage, the absence of the hysteresis, and the possibility of operation in the analog mode. Experimental characteristics of the GLV element are presented.
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