Technology of Latent Image Writing in Chromium Films in Application to Synthesizing Precision Angle Measuring Structures
A. V. Kiryanov, V. G. Nikitin
Keywords: laser image generator, latent image writing technology, precision angle measuring structures, photoelectric angle encoders
Pages: 109-117
Abstract
Specific sources of the error of forming the angle measuring structure topology by raster scanning based on the thermochemical technology of latent image writing in chromium films are analyzed. Relationship between this type of error and the specific features of dynamics of chromium film heating by laser radiation is found. A structure writing correction algorithm is proposed and implemented. The algorithm ensures an accuracy of synthesizing angle measuring structures of about several seconds of arc.
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