Dynamics of Latent Image Writing in Chromium Films: Modeling and Experiment
V. G. Nikitin
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch,
Russian Academy of Sciences, Novosibirsk, Russia
E-mail: vladn@tdisie.nsc.ru
Pages: 563-570
Abstract
Peculiarities of forming a temperature track in circular laser writing in chromium films on glass substrates are studied. The temperature field is calculated for a wide range of writing diameters (20-150 mm). Dynamics of heating a chromium film on a quartz substrate upon switching on the beam in the course of movement for cases with temperature-dependent and independent thermophysical coefficients of the film and substrate is considered. Calculation results show the difference in the form (asymmetry) of the temperature track for an on/off writing beam. A method for correcting the procedure of choosing the writing beam power for producing small (about several microns) grooves is proposed. Calculated and experimental data are compared. The difference between images of synthetic microstructures in transmitted and reflected light is discussed.
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