Hydrogen Chloride Desorption from the Chlorinated Silane Solutions
L. A. BORISOVA, S. V. SYSOEV and V. A. TITOV
Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
E-mail: phys@che.nsk.su
Pages: 227-230
Abstract
Rate of hydrogen chloride desorption from the SiCl4 and SiHCl3 solutions was studied in time at gas end pressure Ptotal= 1.3 atm in a temperature range of 223-293 K. One may use desorption rate data for choosing better conditions for the HCl recover from chlorinated silanes.
|
