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Avtometriya

2005 year, number 6

Inspection of the Geometrical Parameters of Holes by a Ring Diffractive Focuser

L.V. Finogenov
Novosibirsk
Pages: 20-26

Abstract

A non-contact optoelectronic method for complex inspection of extended holes with diameter of more than 10 mm is analyzed. Results of experiments on measuring the nonlinearity of the axis, diameters, and the deviation of the hole shape are presented.