Diffraction Method for Measuring the Diameters of Circular Reflecting Cylinders
Yu.A. Lemeshko and Yu.V. Chugui
Novosibirsk
Pages: 3-11
Abstract
A diffraction method for measuring circular reflecting cylinders with large diameters (of several millimeters and more) is discussed. The distinctive feature of the method is that the diameter is measured not by a diffraction pattern from a cylinder but by processing diffraction patterns from gaps between cylinder edges and reference half planes. Hence, it is possible to achieve high sensitivity of the method for inspecting objects of large diameter. An equivalent model of forming a Fraunhofer diffraction pattern by the object measured is developed and used as a base for a measurement information processing algorithm to determine diameters of objects.