MATHEMATICAL MODELING OF DIAPHRAGM SENSING ELEMENTS IN AMPLITUDE FIBER-OPTIC PRESSURE SENSORS
V.A.Gridchin and A.D.Byalik
Novosibirsk
Pages: 48-54
Abstract
Problems concerned with modeling profiled silicon diaphragms as sensitive elements of amplitude fiber-optic pressure sensors are considered. The simplified model error is estimated. A version of describing the sensitivity of a microreflector in fiber-optic sensors as a function of rigid center width is proposed.
