Home – Home – Jornals – Avtometriya 2004 number 2

The state and prospects for development of metrological provision of linear measurements in the nanometer range are considered. Problems of nanometer measurement technique are formulated and the most important tasks of their solution are defined. By analyzing the potentialities of different methods and facilities of nanometry, and also the fabrication technologies and designs of measures of small length it became possible to advise the most optimal ones in terms of their resolution, stability, and measurement error. Results of experimental investigation of a reference measurement complex based on a scanning probe microscope and a laser interferometer, which ensures real-time 3D measurement of linear dimensions with the atomic resolution are presented.