Dimensional inspection of circular reflecting cylinders by the interferometric method
Yu.A.Lemeshko and Yu.V.Chugui
Novosibirsk
Pages: 35–43 Subsection: INFORMATION-MEASUREMENT SYSTEMS
Abstract
The interferometric method of measuring diameters of circular reflecting cylinders is investigated. The interference field behavior under conditions of inaccurate positioning of the object measured is studied in the geometrical optics approach. It is shown that in recording a field in the remote zone the measurement error of object diameter, caused by its inaccurate positioning, is substantially diminished. To estimate the effect of light diffraction on the interference pattern, an equivalent model was constructed; according to this model, the field can be considered as a result of interference between a plane monochromatic wave and two point sources: a
|