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Avtometriya

2003 year, number 2

An automated system for thin polymer film deposition

V.P.Bessmeltsev, L.V.Vydrin, N.V.Goloshevsky, and M.V.Maksimov
Novosibirsk
Pages: 42–48

Abstract

An automated system is developed for depositing polymer films of compositions with a viscosity of 10