Optical and Gas-Dynamic Measurements in a Microwave Discharge Plasma Flow under Conditions of Gas-Jet Synthesis of Diamond
A. A. Emelyanov, V. A. Pinaev, M. Yu. Plotnikov, A. K. Rebrov, N. I. Timoshenko, I. B. Yudin
Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia
Keywords: gas-jet synthesis of diamond, microwave plasma, optical emission spectroscopy, gas-dynamic measurements
Abstract
Results of optical and gas-dynamic investigations of the microwave discharge plasma under conditions of gas-jet synthesis of diamond are reported. The data are analyzed for determining the temperature and composition of the mixture in the discharge chamber for the purpose of further optimization of the method. The influence of the flow rate of the injected gas mixture on the macroparameters of the gas mixture flow at the exit of the discharge chamber is studied. The temperature and pressure measured in the discharge chamber are used for the numerical analysis of the mixture composition depending on the injected gas flow rate. It is demonstrated that the mixture composition at the exit of the discharge chamber correlates with the rate of diamond synthesis.
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