METHOD FOR CONTROLLING ERRORS IN THE FABRICATION OF PRECISION SYNTHESIZED HOLOGRAMS ON CIRCULAR LASER WRITING SYSTEMS
R. V. Shimansky
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Keywords: метод контроля точности, прецизионные синтезированные структуры, круговая лазерная записывающая система, радиальная координата, координатные метки, accuracy control method, precision synthesized structures, circular laser writing system, radial coordinate, coordinate marks
Abstract
A method has been developed and tested to control the fabrication accuracy of precision synthesized structures on circular laser writing systems using specialized microstructures formed in two orthogonal directions. These microstructures consist of two parts, one of which is formed before the fabrication of a precision structure, and the second during the fabrication of the structure. The shift between the first and second part of the microstructure allows one to determine the errors of drift, substrate shift, etc. on each of the coordinates. The method provides an increase in the accuracy and certification reliability in the fabrication of precision synthesized structures.
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