AUTOMATED INTERFERENCE TOOLS OF THE ALL-RUSSIAN RESEARCH INSTITUTE FOR OPTICAL AND PHYSICAL MEASUREMENTS
G. N. Vishnyakov, G. G. Levin, V. L. Minaev
All-Russian Research Institute for Optical and Physical Measurements, 119361, Moscow, ul. Ozernaya, 46
Keywords: интерферометр, интерферометр Линника, интерференционный микроскоп, метод фазовых шагов, interferometer, Linnik interferometer, interference microscope, phase stepping method
Abstract
A review of advanced equipment for automated interference measurements developed at the All-Russian Research Institute for Optical and PHysical Measurements is given. Three types of interference microscopes based on the Linnik, Twyman-Green, and Fizeau interferometers with the use of the phase stepping method are presented.
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