LASER TECHNOLOGIES IN MICRO-OPTICS. PART 1. MANUFACTURE OF DIFFRACTION OPTICAL ELEMENTS AND PHOTOMASKS AMPLITUDE TRANSMISSION
V. P. Veyko1, V. P. Korolkov2, A. G. Poleshchuk2, D. A. Sinev1, E. A. Shakhno1
1National Research University of Information Technologies, Mechanics and Optics, 197101, St. Petersburg, Kronverkskii pr., 49
2Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, pr. Academika Koptyuga, 1
Keywords: лазерная технология, термохимия, лазерная запись, аморфный кремний, LDW-стекло, полутоновые фотошаблоны, laser technology, thermochemistry, laser recording, amorphous silicon, LDW glass, grayscale photomasks
Abstract
This paper is a review of the studies carried out by the staff of the National Research University of Information Technologies, Mechanics and Optics (ITMO University, Saint-Petersburg) and the Institute of Automation and Electrometry of the Siberian Branch of the Russian Academy of Sciences (Novosibirsk) in the field of development of laser technogical processes for the formation of the structure of diffraction optical elements (DOEs) and photomasks with amplitude binary and semitone transmission. The paper also describes the results of the study of laser thermochemical technology for manufacturing chrome DOEs, technologies for the manufacture of halftone DOEs, and photomasks based on the use of amorphous silicon and LDW glass.
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