EFFECT OF THE STRUCTURE AND MECHANICAL PROPERTIES OF THE NEAR-SURFACE LAYER OF LITHIUM NIOBATE SINGLE CRYSTALS ON THE MANUFACTURE OF INTEGRATED OPTICAL CIRCUITS
A. V. Sosunov, R. S. Ponomarev, V. A. Yur'ev, A. B. Volintsev
Perm State National Research University, 614990, Perm, ul. Bukireva, 15
Keywords: ниобат лития, приповерхностный слой, плотность дислокации, структурные дефекты, механические свойства, интегрально-оптическая схема, lithium niobate, surface layer, dislocation density, structural defects, mechanical properties, integrated optical circuit
Abstract
This paper shows that the near-surface layer of a lithium niobate single layer 15 μm in depth is essentially different from the rest of the volume of the material from the standpoint of composition, structure, and mechanical properties. The pointed out difference are due to the effect of cutting, polishing, and smoothing of the lithium niobate plates, which result in an increase in the density of point defects and dislocations. The increasing density of the structural defects leads to uncontrollable changes in the conditions of the formations of waveguides and the drifting of characteristics of integrated optical circuits. The results obtained are very important for the manufacture of lithium niobate based integrated optical circuits.
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