USING THE DIFFERENTIAL METHOD OF MEASUREMENT TO CONTROL THE ACCURACY OF PRECISION ANGLE MEASURING STRUCTURES
V. P. Kiryanov, A. V. Kiryanov, V. V. Chukanov
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, prosp. Akademika Koptyuga, 1
Keywords: углоизмерительные структуры, дифференциальный метод контроля, датчики углового положения, аэростатический подшипник, углоизмерительная машина, angle measuring structures, differential method of control, angle encoder, air bearing, angle measuring machine
Abstract
Specific features of monitoring metrological parameters of optical scales, limbs, or code disks are considered. A concept of building an intelligent mechatronic module on the air bearing basis for a high-performance angle measuring machine is proposed. The result is achieved by using the differential method of control in the mechatronic module design. This method allows one to determine the contribution of the measuring machine to the resulting error of structures.
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