Uncooled Microbolometer Mosaic Focal Plane Arrays for the Infrared and Terahertz Ranges
M. A. Dem’yanenko1, A. I. Kozlov1, A. R. Novoselov2, V. N. Ovsyuk1
1Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, pr. Lavrent’eva, 13 Novosibirsk, 630090 Russia
2Design and Technological Institute of Applied Microelectronics, Siberian Branch, Russian Academy of Sciences, ul. Nikolaeva 8, Novosibirsk, 630090 Russia
Keywords: мозаичный фотоприёмник, неохлаждаемый микроболометр, кремниевый мультиплексор, схема считывания фотосигналов, инфракрасный и терагерцовый диапазоны, mosaic focal plane array, uncooled microbolometer, readout integrated circuit, infrared and terahertz ranges
Pages: 203-209
Abstract
Mosaic focal plane arrays (MFPAs) have been designed, and a number of addressing schemes reducing the blind zone have been proposed. A precision technology for fabricating MFPAs with a total size of the blind zone of not more than 30 μm has been developed. Certain systemic issues of applying MFPAs are discussed. The designed 3072 x 576 uncooled microbolometer MFPAs based on 384 x 288 submodules with a pixel pitch of 17-51 μm provide ~99 % image conversion efficiency in the infrared range and those with a pixel pitch of 100 μm provide 100 % image conversion efficiency in the terahertz range.
DOI: http://dx.doi.org/10.3103/S875669901602014X
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