STRUCTURE OF PLATINUM COATINGS OBTAINED BY CHEMICAL VAPOR DEPOSITION
N. V. Gelfond1, V. V. Krisyk1, S. I. Dorovskikh1, D. B. Kal’nyi1,2, E.A. Maksimovskii1, Yu. V. Shubin1,2, S. V. Trubin1, N. B. Morozova1
1Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Novosibirsk National Research State University, Novosibirsk, Russia
Keywords: платиновые покрытия, MOCVD, бис(ацетилацетонат) платины(II), катоды и аноды электрокардиостимуляторов, platinum coatings, MOCVD, platinum(II) bis(acetylacetonate), pacemaker cathodes and anodes
Abstract
To the best of our knowledge, it is the first time that the method of chemical vapor deposition (MOCVD) with platinum(II) bis(acetylacetonate) (Pt(acac)2) is used to obtain platinum coatings on the cathodes and anodes of the electrodes for pacemakers. The deposition processes are carried out under reduced pressure in the presence of oxygen. The phase and elemental composition, structure, and morphology of the coatings are examined by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and energy dispersive spectroscopy (EDS). Platinum coatings with a columnar structure are prepared in the temperature range 280-340°C. An increase in the deposition temperature leads to a change in the structure of the coatings and reduction in their thickness. Cyclic voltammetry (CV) is used to estimate the specific capacities of the platinum coatings on the cathodes and anodes, the maximum values of which are 426 mC/cm2 and 1160 mC/cm2, respectively.
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