GRAZING INCIDENCE X-RAY DIFFRACTION (GIRXD) STUDY OF THE PHASE COMPOSITION OF SiCxFey AND SiCxNyFez THIN FILMS
R. V. Pushkarev1, N. I. Fainer1, K. K. Maurya2
1Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2National Physical Laboratory, 110012, New Delhi, India
Keywords: рентгеновская дифракция в геометрии скользящего падения пучка, пленки состава SiCFe и SiCNFe, ферроцен, grazing incidence X-ray diffraction, films with the compositions SiCFe and SiCNFe, ferrocene
Abstract
Films of various composition are synthesized by chemical vapor deposition under low pressure using the thermal decomposition of the following initial gas mixtures: ferrocene Fe(C5H5)2 and helium; ferrocene, tris(diethylamino)silane [(C2H5)2N]3SiH (TDEAS) and helium; ferrocene, 1,1,1,3,3,3-hexamethyldisilazane [(CH3)3Si]2NH (HMDS), and helium. The chemical composition of the films obtained is analyzed by FTIR and Raman spectroscopies. The phase composition of the films is studied by grazing incidence X-ray diffraction (GIXRD). It is determined that the films grown from the gas mixtures of organiosilicon compounds (TDEAS or HMDS), ferrocene, and helium have the same chemical and phase composition (SiCxNyFez), while the films obtained from the mixture of ferrocene and helium have another composition (SiCxFey).
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