X-RAY DIFFRACTION STUDY OF VERTICALLY ALIGNED LAYERS OF h-BN, OBTAINED BY PECVD FROM BORAZINE AND AMMONIA OR HELIUM MIXTURES
I. S. Merenkov1, I. A. Kasatkin2, M. L. Kosinova1
1Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2St. Petersburg State University, Novosibirsk, Russia
Keywords: гексагональный нитрид бора, тонкие пленки, PECVD, боразин, наностенки, фазовый состав, hexagonal boron nitride, thin films, PECVD, borazine, nanowalls, phase composition
Abstract
The method of grazing incidence X-ray diffraction (GIXRD) is used to study the hexagonal boron nitride (h-BN) films produced by plasma-enhanced chemical vapor deposition (PECVD) from borazine and ammonia or helium mixtures. The diffraction patterns of boron nitride layers aligned vertically on the substrate are obtained for the first time. The films deposited consist of the amorphous phase and the nanocrystalline h-BN phase. The nanocrystallite sizes in the films obtained from the mixtures of borazine (B3N3H6) with both ammonia and helium increase with an increase in the synthesis temperature. Nanocrystallites are heteraxial and have a layered structure with the interplanar spacing of ~0.35 nm.
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