White-Light Interferometer with Partial Correlogram Scanning
E. V. Sysoev
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, E-mail: evsml@mail.ru
Pages: 83-89
Abstract
A method for measurement of a surface microprofile with a nanometer resolution is described. The method is based on partial scanning of correlograms in a Linnik white-light interferometer. Experimental results on measurements of thin film thickness are presented. It is shown that a depth resolution of better than 1 nm can be obtained by correlogram scanning in the range from 1 to 2 periods.
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