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2005 year, number 6

Fresnel Measurement Method Accuracy Increasing in Partially Coherent Light

Yu.V. Chugui, N.A. Yakovenko, and M.D. Yaluplin
Pages: 12-19


Methods for increasing the accuracy of the Fresnel measurement method with the use of partially coherent light are investigated. The systematic measurement error caused by interfering diffraction edges of an object is estimated. An algorithm for decreasing the lower measurement range of the method and increasing the accuracy in this range is proposed.