MEASUREMENT OF LOCAL DEVIATIONS OF A SURFACE PROFILE BASED ON PARTIALLY COHERENT LIGHT INTERFERENCE
E.V.Sysoev, I.V.Golubev, Yu.V.Chugui, and V.A.Shakhmatov
Novosibirsk
Pages: 4-11
Abstract
An optoelectronic method for measuring a surface profile using interference patterns of partially coherent light is considered. An industrial system for measuring surface defects was developed. A block diagram and specifications of the system are presented. A method for estimating the surface profile depth using the polyzonal interference patterns of partially coherent light is proposed. Results of experimental verification of the method are provided.
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