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Avtometriya

2003 year, number 6

Optical information technologies, elements, and systems

V. P. Koronkevich and G. A. Lenkova
Novosibirsk
Pages: 23–33

Abstract

The total and minimized instrumental errors of a diffraction common-path interferometer are analytically investigated. The interferometer is based on a zone plate and intended to measure the shape of surfaces and mirrors of the second order. In the scheme under analysis, the interfering wave fronts are noninverted wave fronts. It is shown that the character of instrumental error variation relative to the coordinates of the measured surface does not depend on the value of its conic parameter. When the focal length of a zone plate is much smaller than the surface curvature radius, spherical articles are controlled by the null method whereas in the case of aspherical articles, preliminary calculated corrections are introduced to the measurement results. The obtained relationship between the value of mirror displacement and the instrumental error allows one to calculate the admissible accuracy of mirror position.