Physicochemical Processes of Formation and Properties of Thin-Film Materials Based on the Oxides of Zirconium and of the Elements of Iron Triad
A. M. SHULPEKOV, L. P. BORILO and O. V. TURETSKOVA
Tomsk State University, Pr. Lenina 36, Tomsk 634050 (Russia), E-mail: turez2002@mail.ru
Pages: 763-766
Abstract
Thin-film materials based on zirconium dioxide and the oxides of iron triad elements are obtained. Physicochemical processes of their formation are investigated. It is stated that the films are dielectrics with large refractive index (2.0
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