Methods of Improving the Accuracy of Operation of an Autofocus in a Circular Laser Writing System
D. E. Denk, A. G. Poleshchuk
Keywords: laser writing, autofocus, diffraction optics, automatic control system
Pages: 107-117
Abstract
Specific features of operation of an autofocus in a CLWS-300IAE circular laser writing system are considered. The influence of the focus error on the process of direct laser writing of diffraction structures is considered. A digital adaptive controller for the system of autofocus control is described and studied in experiments. Algorithms of controller operation, a technique for its tuning, and experimental results are described.
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